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Atmospheric Measurement Techniques An interactive open-access journal of the European Geosciences Union
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AMT | Articles | Volume 12, issue 10
Atmos. Meas. Tech., 12, 5335–5345, 2019
© Author(s) 2019. This work is distributed under
the Creative Commons Attribution 4.0 License.
Atmos. Meas. Tech., 12, 5335–5345, 2019
© Author(s) 2019. This work is distributed under
the Creative Commons Attribution 4.0 License.

Research article 08 Oct 2019

Research article | 08 Oct 2019

Microelectromechanical-system-based condensation particle counter for real-time monitoring of airborne ultrafine particles

Seong-Jae Yoo et al.

Related subject area

Subject: Aerosols | Technique: Laboratory Measurement | Topic: Instruments and Platforms
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Cited articles

Chang, H.-K. and Kim, Y.-K.: UV-LIGA process for high aspect ratio structure using stress barrier and C-shaped etch hole, Sens. Actuat. A, 84, 342–350, 2000. 
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Donaldson, K., Li, X., and MacNee, W.: Ultrafine (nanometre) particle mediated lung injury, J. Aerosol Sci., 29, 553–560, 1998. 
Donovan, R., Locke, B., Osburn, C., and Caviness, A.: Ultrafine aerosol particles in semiconductor cleanrooms, J. Electrochem. Soc., 132, 2730–2738, 1985. 
Publications Copernicus
Short summary
We present a portable, inexpensive, and accurate microelectromechanical-system-based (MEMS-based) condensation particle counter (CPC) for the sensitive and precise monitoring of airborne ultrafine particles (UFPs). The CPC is miniaturized by utilizing MEMS technology and 3-D printing. Thus, the proposed system can potentially be used for UFP monitoring in various environments.
We present a portable, inexpensive, and accurate microelectromechanical-system-based...